Data for publication: Temperature distributions in MEMS microheaters during gas phase experiments in an environmental TEM

DTU Data 2026 Dataset Open access

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Authors: Søren Bredmose Simonsen, Amit Kumar, Zhongtao Ma, Julian Taubmann, Arash Nemati, Kristian Speranza Mølhave, Joerg Ralf Jinschek, Magnus Björnsson
DOI: 10.11583/dtu.31143907
Cited by: 0

Abstract

This is data for the publication:Temperature distributions in MEMS microheaters during gas phase experiments in an environmental TEMBy A. Kumar, Z. Ma. J. Taubmann, A. Nemati, K.S. Mølhave. J. Jinchek, M. Björnsson, S.B. SimonsenPublished in Ultramicroscopy, 2026, DOI: https://doi.org/10.1016/j.ultramic.2026.114326

Fields of Study & Subjects

Advanced Electron Microscopy Techniques and Applications Advanced MEMS and NEMS Technologies Electron and X-Ray Spectroscopy Techniques

Publication details

Journal / source
DTU Data
Publication date
1 January 2026
Document type
Dataset