Design and verification of a large-stroke two-axis piezoelectric fast steering mirror

To address the limited angular deflection range of piezoelectric fast steering mirrors (FSMs) caused by the small displacement output of piezoelectric actuators, this paper proposes a novel structural design for a piezoelectric FSM. Based on the application requirements of airborne secondary stabilization and aiming systems, detailed design and selection were conducted for key components, including the driving elements, amplification mechanism, flexible hinges, and feedback sensors. A two-stage lever amplification mechanism was employed to amplify the displacement of piezoelectric actuators, effectively resolving the inherent limitation of small piezoelectric ceramic elongation and significantly enhancing the angular deflection range of the FSM. A cross-spring flexible hinge was adopted as the motion joint to achieve large-angle biaxial deflection. Finite element simulations were performed to analyze the maximum deflection angle, equivalent stress, resonant frequency, and vibration modes. Experimental results demonstrate that the designed FSM achieves an angular deflection range exceeding 36 mrad and Linearity better than 0.5%, meeting the requirements for large-angle, high-precision beam steering.