Introduction
Abstract
Introduction: Plasma is one of the four fundamental states of matter and exists in the form of natural plasma and laboratory plasma. The main subject of the present book, “PLASMA ELECTRONICS” is the quantitative description of a low-temperature, non-equilibrium plasma generated within a reactor for device manufacturing and surface modification of the material. The final goal is the prediction and design of the technological plasma processes based on computational physics.
Fields of Study & Subjects
Low-Pressure Plasma Processing and Diagnostics
Atmospheric-Pressure Plasma Applications
Vacuum and Plasma Arcs
Publication details
- Journal / source
- CRC Press eBooks
- Pages
- 1–5
- Publication date
- 10 March 2026
- Language
- EN
- Document type
- Book chapter