Inductively Coupled Plasma

CRC Press eBooks 2026 Book chapter

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Authors: Toshiaki Makabe, Zoran Petrović
DOI: 10.1201/9781003710721-11
Cited by: 0

Abstract

Characteristics of Inductively Coupled Plasma (ICP): High-density plasma with a lower ion kinetic energy is realized in an inductively coupled reactor. In addition to a 2D-profile of ICP influenced by a long-lived excited species, two specific characteristics, E-H transition and cut-off of electromagnetic wave are illustrated.

Fields of Study & Subjects

Low-Pressure Plasma Processing and Diagnostics Vacuum and Plasma Arcs Atmospheric-Pressure Plasma Applications

Publication details

Journal / source
CRC Press eBooks
Pages
289–305
Publication date
10 March 2026
Language
EN
Document type
Book chapter