Elementary Processes in Gas Phase and on Surfaces
Abstract
Collision physics in gas phase and on surfaces: Atomic and molecular collision processes of an electron are the basis of the quantitative understanding of the stochastic characteristics of the transport. The elementary collision processes in gases and on surfaces are described in detail, using classical and quantum mechanics. Heavy particle collisions and photon interactions are also described as the fundamental processes.
Fields of Study & Subjects
Atomic and Molecular Physics
Gas Dynamics and Kinetic Theory
Low-Pressure Plasma Processing and Diagnostics
Publication details
- Journal / source
- CRC Press eBooks
- Pages
- 47–150
- Publication date
- 10 March 2026
- Language
- EN
- Document type
- Book chapter