Sandblasting of glass substrates

MEMS and microfluidics technologies represent revolutionary fields with a wide array of applications that deeply impact our society [ 1–4 ]. These miniature systems empower precise control and manipulation of fluids and mechanical components at the micro- and nanoscales, leading to transformative innovations across numerous industries. Their applications span from point-of-care medical diagnostics and drug delivery [ 5 ] to telecommunications [ 6 ] and environmental monitoring [ 7 , 8 ]. The importance of these technologies lies in their remarkable ability to enhance efficiency, reduce costs, and provide groundbreaking solutions to the intricate challenges of our rapidly evolving world.