Numerical Simulation of Generalities of Gas Dynamics and Chemical Species Diffusion in Plasma Jet CVD Reactor
Abstract
The gas dynamics and chemical species diffusion are general processes in plasma jet CVD reactors [ 1 ]. Therefore, the consideration of these processes can be of independent interest, as all chemical reactions occur in the background of these processes.
Fields of Study & Subjects
Plasma Diagnostics and Applications
Vacuum and Plasma Arcs
Gas Dynamics and Kinetic Theory
Publication details
- Journal / source
- CRC Press eBooks
- Pages
- 254–261
- Publication date
- 2 February 2026
- Language
- EN
- Document type
- Book chapter