ESR of Defects in Surface Layer of As-Grown and Ion Implanted CVD Diamond Films

Defects in diamond films prepared by chemical vapor deposition (CVD) method have been studied using electron spin resonance (ESR) measurement. Two kinds of ESR centers were observed in CVD diamond films. One is a narrow line ( P dio -center: g = 2.003, ΔH pp = 3 Oe originating from carbon dangling bonds in diamond phase carbon. The other is a broad Lorentzian line ( P ac -center: g = 2.003, ΔH pp = 8 Oe) originating from carbon dangling bonds in non-diamond phase carbon region. The P ac -center exists in the surface region of CVD diamond films with spin density of 10 20 spins/cm 3 . Diamond surface is converted to an amorphous carbon layer by N + ion implantation.