Growth of A1N Films and Diamond/A1N Layer System Application in Acoustoelectronics

CRC Press eBooks 2026 Book chapter

View at publisher
Authors: A. F. Belyanin, A. N. Blaut-Blachev, L.L. Bouilov, B.V. Spitsyn
DOI: 10.1201/9781003760405-53
Cited by: 0

Abstract

The effect of growth conditions on the structure of A1N films manufactured by RF magnetron sputtering in Ar-N2 gas mixture has been considered. Multilayer structure based on polycrystalline diamond and textured A1N film has been used to produce surface acoustic wave filters and delay lines operating up to 1.52 GHz.

Fields of Study & Subjects

Acoustic Wave Resonator Technologies Metal and Thin Film Mechanics Diamond and Carbon-based Materials Research

Publication details

Journal / source
CRC Press eBooks
Pages
392–397
Publication date
2 February 2026
Language
EN
Document type
Book chapter