Optical and TEM Study of Copper-born Clusters in DLC

CRC Press eBooks 2026 Book chapter

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Authors: Vladimir I. Ivanov-Omskii, S. G. Yastrebov, Alexandra A. Suvorova, A. A. Sltnikova, A. V. Tolmatchev
DOI: 10.1201/9781003760405-59
Cited by: 0

Abstract

Transmission Electron Microscopy (TEM) (100 keV), Selected Area Electron Diffraction (SAED) and optical absorption data (0.6-5 eV) of copper-doped Diamond-like Carbon (DLC) films are presented. The size distribution functions (SDF) of copper-born clusters embedded in DLC were obtained both with direct observation of TEM images of clusters and from numerical analysis of optical data. Validity of optical SDF is discussed. TEM SDF is analyzed in the frames of fluctuation mechanism of early stage of cluster formation.

Fields of Study & Subjects

Diamond and Carbon-based Materials Research Metal and Thin Film Mechanics Copper Interconnects and Reliability

Publication details

Journal / source
CRC Press eBooks
Pages
438–447
Publication date
2 February 2026
Language
EN
Document type
Book chapter