UV-Sensors from Diamond-Like Carbon Films

Metal-semiconductor-semiconductor (MSS) UV-cells (Al/C/In 2 O 3 : SnO 2 ) with diamond-like carbon base layers have been fabricated. The diamond-like carbon films on single crystal silicon (100) substrate were obtained by means of pulsed laser deposition (1060 nm, 25 ns long). The influence of substrate temperature on film microstructure was investigated by transmission electron microscopy and electron diffraction. The results of these investigations have been in turn used to optimize the parameters of diamond-like film growth process. The improvements of photocells quality can be achieved by use of high quality diamond-like films. By measuring the photosensitive characteristics of the MSS-cells we have found a photo-EMF of 15-20 mV in the wavelength range from 300 to 350 nm.