The calculation of the optical constants of indium-tin-oxide films

CRC Press eBooks 2026 Book chapter

View at publisher
Authors: Lingjia Meng, F. Placido, V. Teixeira, M.P. dos Santos
DOI: 10.1201/9781003762553-111
Cited by: 0

Abstract

ITO thin films were deposited on the glass substrates by microwave-enhanced dc reactive magnetron sputtering technique at different oxygen partial pressures (3.8 – 11.7 × 10 –4 mbar). The optical properties were studied by measuring the transmittance and the ellipsometric spectra. The optical constants of the films in the telecommunication wavelengths (1500 – 1600 nm) were obtained by fitting the transmittance combined with spectroscopic ellipsometry measurement.

Fields of Study & Subjects

ZnO doping and properties Thin-Film Transistor Technologies Optical Coatings and Gratings

Publication details

Journal / source
CRC Press eBooks
Pages
811–815
Publication date
24 February 2026
Language
EN
Document type
Book chapter