On-wafer Characterization of Emerging Technologies

This presentation by Chhandak Mukherjee from IMS Laboratory, CNRS, University of Bordeaux, discusses the challenges and methodologies in characterizing emerging nanoscale technologies, specifically junctionless vertical nanowire transistors. It outlines the extraction of various device parameters, both DC and AC methods, and highlights novel approaches to overcome the limitations of traditional characterization techniques. The content delves into the specifics of test structures for RF characterization, noise analysis, and thermal resistance extraction, providing insights into advanced measurement and modeling strategies essential for future semiconductor technologies.