Design and Simulation of a MEMS Liquid Flow Rate Sensor Based on Differential Pressure Measurement
Fields of Study & Subjects
Advanced MEMS and NEMS Technologies
Flow Measurement and Analysis
Microfluidic and Capillary Electrophoresis Applications
Publication details
- Journal / source
- International Journal of Fluid Dynamics
- Volume
- 14
- Issue
- 01
- Pages
- 1–10
- Publication date
- 1 January 2026