Structural Design and Performance Research of Silicon Carbide MEMS Piezoresistive Pressure Sensor

Journal of Sensor Technology and Application 2026

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Authors: 钿赵

DOI: 10.12677/jsta.2026.142025

Cited by: 0

References: 19

Fields of Study & Subjects

Advanced MEMS and NEMS Technologies Acoustic Wave Resonator Technologies Advanced Sensor and Energy Harvesting Materials

References 19