Phase-Field Modeling of Thermo-Mechanical Damage in MEMS Thermally Conductive Films

Mechanical Engineering and Technology 2026

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Authors: 椅晏

DOI: 10.12677/met.2026.151005

Cited by: 0

References: 15

Fields of Study & Subjects

Advanced MEMS and NEMS Technologies Thermoelastic and Magnetoelastic Phenomena Thermal properties of materials

References 15