Radiation Risk in Semiconductor Device Manufacturing Processes: Device Degradation and Soft Errors Induced by Hydrogen Annealing

2026 Open access

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Authors: Kodama, Noriyuki
DOI: 10.13140/rg.2.2.19367.41122
Cited by: 0

Fields of Study & Subjects

Radiation Effects in Electronics Semiconductor materials and devices Silicon and Solar Cell Technologies

Publication details

Publication date
1 January 2026