Achieving Ultra High Resolution Lithography via Intrinsic Equilibrium and Electron Driven Spin Resonance

2026

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Authors: Wim Vegt
DOI: 10.13140/rg.2.2.30851.77609
Cited by: 0

Fields of Study & Subjects

Advancements in Photolithography Techniques Electron Spin Resonance Studies Quantum and electron transport phenomena

Publication details

Publication date
1 January 2026
Language
EN