Beam homogenization model of frosted glass in laser interferometer systems
Abstract
A ring source suppresses diffraction-induced annular coherent noise in interferometry, but a solid ring source can generate a central bright spot during propagation, degrading surface figure accuracy. This paper builds a frosted glass beam homogenization model to compute the minimum correlation length required to suppress the spot for different diffusers and proposes correlation length inversion and quantitative calibration using RMS roughness and angular scattering intensity. At 632.8 nm, simulations show that a 600 mesh double-sided frosted glass is effective. A prototype interferometer matches a Zygo interferometer within 2.34 nm PV and 0.83 nm RMS.
Fields of Study & Subjects
Optical measurement and interference techniques
Geophysics and Sensor Technology
Astronomical Observations and Instrumentation
Publication details
- Journal / source
- Applied Optics
- Publisher
- Optica Publishing Group
- Volume
- 65
- Issue
- 20
- Pages
- 6816–6816
- Publication date
- 17 June 2026
- Language
- EN