Room-temperature, 96×96 pixel 3D-stacked InGaAs/InP SPAD sensor with complementary gating for flash LiDAR

Optics Express 2026 Open access

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Authors: Halil Kerim Yildirim, Pascal Rustige, Ekin Kizilkan, Utku Karaca, Baris Efe, Pouyan Keshavarzian, Christoph Stölmacker, Claudio Bruschini, Patrick Runge, Edoardo Charbon
DOI: 10.1364/oe.585267
Cited by: 2
References: 41

Abstract

A room-temperature 3D-stacked flash LiDAR sensor is presented for the short-wave infrared (SWIR). The 96×96 InGaAs-InP SPAD array in the top tier is biased by a circuit at the bottom tier that implements a complementary cascoded gating at the pixel level to control noise and afterpulsing. The bottom-tier chip is fabricated in a 110-nm CMOS technology. The sensor is tested with a 1550nm laser operating at 100 μ W to 3.1mW average power. The SPADs are gated with 3ns pulses with 500ps skew. Intensity images and depth maps are shown both indoors and outdoors at 10m in 120 klux background light with telemetry up to 100m, having better than 2% accuracy.

Fields of Study & Subjects

Advanced Optical Sensing Technologies CCD and CMOS Imaging Sensors Advanced Fiber Optic Sensors

Publication details

Journal / source
Optics Express
Publisher
Optica Publishing Group
Volume
34
Issue
3
Pages
5064–5064
Publication date
21 January 2026
Language
EN