Single-shot common-path Fizeau interferometer for vibration-insensitive nanometric displacement measurement
Abstract
We present a single-shot, common-path Fizeau interferometer for high-precision micro-displacement measurement. By integrating a wire-grid polarizer with a pixelated polarization camera, the system implements spatial polarization phase-shifting for real-time phase retrieval. The common-path configuration and single-exposure acquisition significantly enhance robustness against environmental vibrations and air turbulence. The polarization-multiplexing scheme enables single-exposure measurement, granting the system the capability for real-time dynamic displacement monitoring. Experimental results demonstrate that the proposed method is capable of measuring displacements as small as 2 nm with high repeatability. This compact, vibration-insensitive design offers a robust solution for dynamic nanometric metrology in precision engineering.
Fields of Study & Subjects
Advanced Fiber Optic Sensors
Advanced Measurement and Metrology Techniques
Force Microscopy Techniques and Applications
Publication details
- Journal / source
- Optics Express
- Publisher
- Optica Publishing Group
- Volume
- 34
- Issue
- 5
- Pages
- 8613–8613
- Publication date
- 19 February 2026
- Language
- EN