Robust 5 W continuous-wave 355 nm laser by single-pass third harmonic generation in LBO crystals
Abstract
A high-power, narrow-linewidth, continuous-wave 355 nm laser based on single-pass third-harmonic generation of a fiber laser in two LBO crystals is presented. Both type I and type II critical phase-matching in LBO crystals was investigated for the sum-frequency generation stage. A maximum output power of 5 W with a root-mean-square power stability of 0.73% was achieved by using a type-I critical PM LBO crystal, with a single-pass conversion efficiency of 1.7% from 1064 nm to 355 nm. The relative intensity noise of the 355 nm laser was below -110 dB/Hz in the frequency range above 200 Hz. Such a single-pass THG laser system, with its compact architecture and robustness, has great potential for applications in semiconductor manufacturing and inspection.
Fields of Study & Subjects
Photorefractive and Nonlinear Optics
Crystal Structures and Properties
Solid State Laser Technologies
Publication details
- Journal / source
- Optics Express
- Publisher
- Optica Publishing Group
- Volume
- 34
- Issue
- 5
- Pages
- 8877–8877
- Publication date
- 23 February 2026
- Language
- EN