Multi-NA metalens array for compact high-NA microscopy

Optics Letters 2026

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Authors: Alireza Khalilian, Jie Fan, Mohammad Serhan, Mehdi Sh. Yeganeh, Joe F. Lo, Yasha Yi
DOI: 10.1364/ol.582653
Cited by: 0
References: 22

Abstract

Compact visible-band microscopy benefits from co-planar metalenses that integrate multiple numerical apertures on a single platform. Here, we demonstrate a silicon-rich nitride (SRN) metalens array operating at 660 nm, uniting NA = 0.54/0.92/0.97 within one chip. Device-level characterization confirms tight focal confinement and high focusing efficiency, arising from our tailored PECVD SRN that provides a high, tunable refractive index with low absorption. Fluorescence imaging of AF647-tagged endothelial monolayers verifies functional readiness, and the wafer-scalable process supports compact, high-NA modules for integrated bio-imaging systems.

Fields of Study & Subjects

Metamaterials and Metasurfaces Applications Photonic and Optical Devices Plasmonic and Surface Plasmon Research

Publication details

Journal / source
Optics Letters
Volume
51
Issue
5
Pages
1140–1140
Publication date
9 February 2026
Language
EN