Tabletop spectroscopic ellipsometry for probing optical properties in the extreme ultraviolet

Optics Letters 2026

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Authors: I-Hsueh Li, Yu-Zhi Fu, Yi-Ting Lee, En-Xuan Yao, Pei-Chi Huang, Ming-Shian Tsai, Ming-Chang Chen
DOI: 10.1364/ol.588112
Cited by: 1
References: 17

Abstract

We demonstrate extreme-ultraviolet (EUV) spectroscopic ellipsometry (SE) using a tabletop high-harmonic generation (HHG) source for optical-constant determination. The polarization-resolved system enables accurate retrieval of the complex refractive index n − i k , as validated by measurements on a Nb 2 O 5 film and by indirect determination of the optical constants of molybdenum and gold mirrors in the analyzer. This approach provides a compact and versatile platform for precise EUV optical-constant determination and future ultrafast studies.

Fields of Study & Subjects

Laser-Matter Interactions and Applications Atomic and Molecular Physics Advanced X-ray Imaging Techniques

Publication details

Journal / source
Optics Letters
Publisher
Optica Publishing Group
Volume
51
Issue
4
Pages
845–845
Publication date
3 February 2026
Language
EN