Nanoparticle size determination via through-focus scanning polarized microscopy
Abstract
Accurate qualitative and quantitative characterization of sub-micron nanoparticles with a high efficiency is highly desirable across a wide range of scientific and industrial applications. In this study, we introduce through-focus scanning polarized microscopy (TSPM) for the estimation of nanoparticle parameters, where physical properties of nanoparticles are related to in-focus and out-of-focus polarization-resolved images. The feasibility of TSPM is rigorously demonstrated through a combination of numerical simulation and experimental measurements. Owing to its practical advantages, TSPM is anticipated to emerge as a powerful and versatile tool for highly sensitive metrology of nanoscale objects in material sciences and semiconductor industries.
Fields of Study & Subjects
Near-Field Optical Microscopy
Gold and Silver Nanoparticles Synthesis and Applications
Optical Coatings and Gratings
Publication details
- Journal / source
- Optics Letters
- Publisher
- Optica Publishing Group
- Volume
- 51
- Issue
- 5
- Pages
- 1351–1351
- Publication date
- 9 February 2026
- Language
- EN