INFLUENCE OF TEMPERATURE CONDITIONS DURING THE MANUFACTURING OF PHOTODETECTORS WITH ADJUSTED CURVED IMAGE SURFACE

Subject of study: technological methods for manufacturing photodetectors with an adjusted surface curvature, the influence of temperature conditions on the form of curved sensor surface, and the interrelation of geometric parameters of the curved surface. Aim of study: investigate the effect of temperature conditions during the manufacturing of a multi-element semiconductor radiation detector with a specified curvature of the receiving surface. The research is based on applying of the temperature treatment method to silicon wafers of photodetectors. Surface bending control was carried out applying a laser triangulation measuring system. Theoretical calculations were performed using equations that take into account the physical, mechanical properties of materials, and geometric parameters of the photodetector. The results of experimental measurements have been processed using statistical methods and confirmed through simulation modeling. The study found that, under definite temperature conditions, it is possible to increase the initial curvature of the receiver's surface A method for manufacturing sensor with adjusted curved image surface has been developed, which includes shape correction through repeated thermal treatment process. Dependencies between the geometric parameters of curved surfaces have been identified, which are now used by developers of optical systems and photodetectors. The applying of photodetector with adjusted curved image surface makes it possible to improve the characteristics of the optical system (field of view), ensure the correction of image curvature and reduce the size and weight of lenses.