Data for: "Controlling point defect populations in AlGaN deep UV LEDs"

Results of applying various microscopy techniques to AlGaN deep ultraviolet light-emitting diode structures: (i) atomic force microscopy; and (ii) scanning electron microscopy (using cathodoluminescence, electron beam-induced current, and backscattered electron modes). The measurements are described in detail in the associated paper "Controlling point defect populations in AlGaN deep UV LEDs" by Cameron et al., published in Nanotechnology (2026). Atomic force microscopy data is in SPM format, and the cathodoluminescence images in Gatan Digital Micrograoph format.