Study on the Improvement of Magnetic Bead Transfer Speed by the Combination of Microcoils and Parallel Wires using Two Metal Layers
Abstract
In this study, we investigated the structure of micro-coils to transfer magnetic beads at higher speeds with two metal layers. Parallel wires were placed around a microcoil in two metal layers. The size of the microcoil and the parallel wire was 40µm square and a width of 10µm. The structure was fabricated in a 0.18-µm CMOS standard process, and the transfer experiments were performed on 4.5-µm-diameter magnetic beads. A uniform magnetic field of 2mT was applied from an external electromagnet, and a current upto 10mA was applied to the microcoils and the parallel wires. The magnetic beads were successfully transported between the two microcoils at an average velocity of 77µm/s.
Fields of Study & Subjects
Micro and Nano Robotics
Microfluidic and Bio-sensing Technologies
Advanced MEMS and NEMS Technologies
Publication details
- Journal / source
- IEEJ Transactions on Sensors and Micromachines
- Volume
- 146
- Issue
- 3
- Pages
- 72–76
- Publication date
- 28 February 2026
- Language
- EN