Evolution of optical characteristics of HfO2 and Ge-doped HfO2 thin films upon thermal treatment in inert atmosphere
Fields of Study & Subjects
Semiconductor materials and devices
Advancements in Semiconductor Devices and Circuit Design
Ferroelectric and Negative Capacitance Devices
Publication details
- Journal / source
- MRS Advances
- Publisher
- Springer Science and Business Media LLC
- Volume
- 11
- Issue
- 8
- Pages
- 873–877
- Publication date
- 6 April 2026
- Language
- EN