Tailoring crystallinity in Al2O3 dielectric films via PEALD and sputtering: Implications for thermal budget and device integration

MRS Advances 2026

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Authors: Rajesh Kumar Jha

DOI: 10.1557/s43580-026-01654-z

Cited by: 1

References: 31

Fields of Study & Subjects

Semiconductor materials and devices Copper Interconnects and Reliability Ferroelectric and Piezoelectric Materials

References 31