XRF analysis using the MEMS x-ray source

RepOD 2026 Dataset Open access

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Authors: Tomasz Grzebyk
DOI: 10.18150/xm6hve
Cited by: 0

Abstract

These data contain experimental measurements and analysis supporting the development and evaluation of a miniature MEMS-based X-ray source designed for ultra-compact XRF (X-ray fluorescence) spectrometry, with particular emphasis on potential applications in in-situ extraterrestrial surface analysis. The dataset includes XRF spectra, emission parameters, operational settings of the MEMS X-ray source, and results from tests conducted on lunar regolith simulants both under high vacuum and ambient conditions.

Fields of Study & Subjects

X-ray Spectroscopy and Fluorescence Analysis Electron and X-Ray Spectroscopy Techniques Planetary Science and Exploration

Publication details

Journal / source
RepOD
Publication date
1 January 2026
Language
EN
Document type
Dataset