Maintaining a vacuum in MEMS

These data contain experimental measurements and diagnostics related to vacuum dynamics within hermetically sealed MEMS (microelectromechanical systems) structures that incorporate electron-emission components. The dataset includes pressure measurements, residual gas composition spectra, and operational parameters obtained during in situ evaluation of vacuum conditions under electron beam exposure. The focus of the study is on the mechanisms of vacuum degradation—including electron-stimulated desorption (ESD) from silicon and borosilicate glass surfaces—and on the performance of an integrated ion-sorption pump (Sensor–Analyzer–Pump, SAP) implemented within the sealed MEMS device for maintaining high vacuum.