Nanolaminated Al100−zNiz / AlOxHy thin films by hybrid PVD / ALD: An approach towards interface-engineered thin films by dual-route tailoring

RWTH Publications (RWTH Aachen) 2026 Open access

Read full text

Authors: Hendrik C. Jansen, Amit Sharma, Marcus Hans, Jochen M. Schneider, Jakob Schwiedrzik, Johann Michler, Thomas Edward James Edwards

DOI: 10.18154/rwth-2026-01627

Cited by: 0

Fields of Study & Subjects

Semiconductor materials and devices Metal and Thin Film Mechanics Advanced Materials and Semiconductor Technologies