Controlled bending of a charged elastic cantilever in electric field

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Authors: G. V. Kostin
Cited by: 1
References: 6

Abstract

The bending of ultrathin single-layer metal plates in a controlled electric field is modeled. The plate (cantilever) form factor corresponds to elements of high-speed optical shutters in dynamic X-ray lithography. System controllability under the influence of a slowly varying electric field is investigated. The cantilever is a thin rectangular elastic plate, clamped on one side and hinged supported at a certain distance from the opposite free side. Problems of static bending and natural vibrations with a constant electric potential applied to the cantilever are studied. Cantilever motion is simulated with a given feedforward control of this potential over time under transverse bending conditions.

Fields of Study & Subjects

Quantum and Classical Electrodynamics Advanced MEMS and NEMS Technologies Advanced Materials and Mechanics

Publication details

Journal / source
Vestnik of Samara University Natural Science Series
Publisher
Samara National Research University
Volume
31
Issue
4
Pages
86–103
Publication date
16 January 2026