Controlled bending of a charged elastic cantilever in electric field
Abstract
The bending of ultrathin single-layer metal plates in a controlled electric field is modeled. The plate (cantilever) form factor corresponds to elements of high-speed optical shutters in dynamic X-ray lithography. System controllability under the influence of a slowly varying electric field is investigated. The cantilever is a thin rectangular elastic plate, clamped on one side and hinged supported at a certain distance from the opposite free side. Problems of static bending and natural vibrations with a constant electric potential applied to the cantilever are studied. Cantilever motion is simulated with a given feedforward control of this potential over time under transverse bending conditions.
Fields of Study & Subjects
Quantum and Classical Electrodynamics
Advanced MEMS and NEMS Technologies
Advanced Materials and Mechanics
Publication details
- Journal / source
- Vestnik of Samara University Natural Science Series
- Publisher
- Samara National Research University
- Volume
- 31
- Issue
- 4
- Pages
- 86–103
- Publication date
- 16 January 2026