Spatially-resolved humidity sensing by capacitive-CMOS arrays

Research Square 2026 Preprint Open access

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Authors: Suman Kundu, Kaï Betlem, Tao Shen, Peter Gerard Steeneken, F. Widdershoven, Murali Krishna Ghatkesar
DOI: 10.21203/rs.3.rs-8272336/v1
Cited by: 0
References: 44

Fields of Study & Subjects

Gas Sensing Nanomaterials and Sensors Advanced Chemical Sensor Technologies Advanced MEMS and NEMS Technologies

Publication details

Journal / source
Research Square
Publication date
16 January 2026
Document type
Preprint