Aspects of Silane Thermal Decomposition

Research Square 2026 Preprint Open access

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Authors: Pierre TOMASINI
DOI: 10.21203/rs.3.rs-8445711/v1
Cited by: 0
References: 78

Fields of Study & Subjects

Semiconductor materials and devices Semiconductor materials and interfaces Advanced Materials and Semiconductor Technologies

Publication details

Journal / source
Research Square
Publication date
3 February 2026
Document type
Preprint