Morphology investigation of MOVPE homoepitaxial (001) β-Ga2O3 growth on on-axis and 6° off-axis substrates

Research Square 2026 Preprint Open access

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Authors: Chen Han-Hsu, Ta‐Shun Chou, Saud Bin Anooz, Zbigniew Galazka, Albert Kwasniewski, Sabine Bergmann, Andreas Popp

DOI: 10.21203/rs.3.rs-8559243/v1

Cited by: 0

Fields of Study & Subjects

Ga2O3 and related materials Semiconductor materials and devices Electronic and Structural Properties of Oxides