Deterministic Atomic Assembly for sub-2nm VLSI: A Unified Field-Theoretic Reactor utilizing the Indian Quartet Paradigm

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Authors: S. Eshwar Rao
Cited by: 0

Abstract

Abstract The semiconductor industry faces a fundamental thermodynamic bottleneck in “Cold Wall” Chem3 ical Vapor Deposition (CVD) reactors, specifically regarding turbulence, mass transport limitations, 4 and thermal non-uniformity at sub-2nm technology nodes. This paper proposes a novel “Unified 5 Field” reactor design that replaces mechanical control with field-modulated operators derived from 6 the works of Srinivasa Ramanujan, Meghnad Saha, S.N. Bose, and C.V. Raman. By integrating Frac7 tal Geometry, Plasma Physics, Quantum Statistics, and Optical Feedback, we derive a Grand Unified 8 Equation for crystal growth. Simulation and hardware verification demonstrate a 1000x improvement 9 in defect density and yield compared to conventional PID-controlled systems

Fields of Study & Subjects

Low-Pressure Plasma Processing and Diagnostics Semiconductor materials and devices Advanced Materials and Semiconductor Technologies

Publication details

Journal / source
Research Square
Publication date
17 March 2026
Language
EN
Document type
Preprint