"Semi-AD (Semiconductor Anomaly Detection) dataset"

"The Semi-AD (Semiconductor Anomaly Detection) dataset is a specialized benchmark for unsupervised comparison-based anomaly detection (AD) in the semiconductor manufacturing. This dataset addresses the critical challenge of identifying rare defects in intricate circuit patterns by leveraging the inherent repetitive structures of semiconductor devices. It provides precisely aligned image pairs consisting of a reference device and a test device and ground truth annotations of defective regions are derived from pixel-wise differences between the aligned pairs.The dataset is categorized into three distinct subsets: two private IC substrate datasets (Chip-side and Ball-side) and a patterned wafer dataset. To support high-efficiency training and pixel-wise localization, the images are provided as cropped samples in 256\u00d7256 and 200\u00d7200 sizes. Structurally, the data is organized into a pair_set for direct comparison tasks and a single_set for individual image analysis, covering both training and testing phases."