Polarity reversal of dipole at the SiO2/HZO interface in FeFETs by oxygen scavenging of TiN

SSRN Electronic Journal 2026 Preprint Open access

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Authors: Manru Gong, Lixing Zhou, Xiaolei Wang, Saifei Dai, Junshuai Chai, Cong Dai, Shuaijie Rong, Yunhao Chen, Chunsheng Guo, Shiwei Feng, Yaming Zhang
DOI: 10.2139/ssrn.5999394
Cited by: 0
References: 11

Fields of Study & Subjects

Ferroelectric and Negative Capacitance Devices Semiconductor materials and devices Ferroelectric and Piezoelectric Materials

Publication details

Journal / source
SSRN Electronic Journal
Publication date
1 January 2026
Document type
Preprint