Combined Effects of BET and PF on the Mechanism and Material Removal in Alkaline Chemical Mechanical Polishing of InP

SSRN Electronic Journal 2026 Preprint Open access

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Authors: Qingzhu Zhang, Ming Nan Sun, Wenwen Zheng, J. Zheng, Yuewei Hu
DOI: 10.2139/ssrn.6019272
Cited by: 0
References: 12

Fields of Study & Subjects

Advanced Surface Polishing Techniques Nanowire Synthesis and Applications Laser Material Processing Techniques

Publication details

Journal / source
SSRN Electronic Journal
Publication date
1 January 2026
Document type
Preprint