Temperature characteristics of MEMS Pressure Sensor with High Proof Pressure for Adjustable Ranges up to 10...60 kPa

SSRN Electronic Journal 2026 Preprint Open access

Read full text

Authors: Mikhail Basov

DOI: 10.2139/ssrn.6019583

Cited by: 0

Fields of Study & Subjects

Advanced MEMS and NEMS Technologies Mechanical and Optical Resonators Geophysics and Sensor Technology