Reliability Evaluation of MEMS Scanning Mirrors with an Embedded Mirror-Monitoring Sensor under External Random Vibrations

SSRN Electronic Journal 2026 Preprint Open access

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Authors: Dohyeon Jeong, Myeongseop Kim, Wonsang Jo, Jong-Hyun Lee
DOI: 10.2139/ssrn.6019586
Cited by: 0
References: 3

Fields of Study & Subjects

Advanced MEMS and NEMS Technologies Mechanical and Optical Resonators Inertial Sensor and Navigation

Publication details

Journal / source
SSRN Electronic Journal
Publication date
1 January 2026
Document type
Preprint