Precision etching process optimization and mechanism investigation for ultrathin Al2O3 thin films at the bottom of trenches

SSRN Electronic Journal 2026 Preprint Open access

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Authors: Chao Song, Yang Bu, Chaoqun Fang, Fang Wu, Xiaoqi Jiang

DOI: 10.2139/ssrn.6021226

Cited by: 0

Fields of Study & Subjects

Plasma Diagnostics and Applications Copper Interconnects and Reliability Optical Coatings and Gratings