Multi-Directional Feature Enhancement Network forLithographic Hotspot Detection

SSRN Electronic Journal 2026 Preprint Open access

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Authors: Yu Liu, Peifei Chen, Ming Zhu, Han Chen, Bo Wu
DOI: 10.2139/ssrn.6023601
Cited by: 0
References: 9

Fields of Study & Subjects

Advancements in Photolithography Techniques Physical Unclonable Functions (PUFs) and Hardware Security Industrial Vision Systems and Defect Detection

Publication details

Journal / source
SSRN Electronic Journal
Publication date
1 January 2026
Document type
Preprint