High-powerhandling and temperature-stable SH-SAW filters using a 42° YX-LT/SiO₂/α-Si/Si multilayer structure

SSRN Electronic Journal 2026 Preprint Open access

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Authors: Yang Chang, Qiaozhen Zhang, Xucheng Li, Feihong Bao, Ying Cheng, Xiaojun Liu
DOI: 10.2139/ssrn.6023856
Cited by: 0
References: 13

Fields of Study & Subjects

Acoustic Wave Resonator Technologies Ferroelectric and Piezoelectric Materials Advanced Sensor and Energy Harvesting Materials

Publication details

Journal / source
SSRN Electronic Journal
Publication date
1 January 2026
Document type
Preprint