Taming the Boundary Effect: Femtosecond Laser Processing of 4H-SiC Enabled by Side-Scribing for Low-Stress Slicing

SSRN Electronic Journal 2026 Preprint Open access

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Authors: Chengqi Yao, Jianshi Wang, Bing Dong, Zongwei Xu, Ying Song, Yifei Duan, Guosong Zeng, Minglie Hu

DOI: 10.2139/ssrn.6024586

Cited by: 0

References: 27

Fields of Study & Subjects

Silicon Carbide Semiconductor Technologies Laser Material Processing Techniques Pulsed Power Technology Applications

References 27