Superresolution Patterning in g-Line Photoresist and Silicon Assisted by Direct-Laser-Written Ge10Sb90 Heat-mode Resist Film

SSRN Electronic Journal 2026 Preprint Open access

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Authors: Juntao Shen, Kui Zhang, Wenbo Liu, Jingsong Wei, Yang Wang

DOI: 10.2139/ssrn.6030750

Cited by: 0

References: 47

Fields of Study & Subjects

Laser Material Processing Techniques Phase-change materials and chalcogenides Optical Coatings and Gratings

References 47