Role of a Precursor in Sub-4 nm In2O3 Semiconductor Films in Atomic Layer Deposition

SSRN Electronic Journal 2026 Preprint Open access

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Authors: J. J. Lee, Byung-Ha Kwak, Ae Rim Choi, Dohee Kim, Seung Wook Ryu, Il‐Kwon Oh

DOI: 10.2139/ssrn.6035078

Cited by: 0

References: 16

Fields of Study & Subjects

Thin-Film Transistor Technologies ZnO doping and properties Semiconductor materials and devices

References 16