Features of the formation of the phase composition, electronic structure, and electrical properties of CuxSi1-x (x=9 – 53 at.%) films during ion-beam sputtering

SSRN Electronic Journal 2026 Preprint Open access

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Authors: Konstantin A. Barkov, Evgenii S. Kersnovsky, Ivan V. Polshin, Sergey Alexandrovich Ivkov, Andrey I. Chukavin, Potudanskii G.P., В. Р. Радина, Alexander S. Doroshkevich, P.L. Tuan, Zh. V. Mezentseva, Sergey V. Rodivilov, Nikita S. Buylov
+7 more Dmitry N. Nesterov, A. K. Pelagina, V. V. Pobedinsky, K. M. Moiseev, Tran Van Tu, Aleksandr Nikonov, Alexander Viktorovitch Sitnikov
DOI: 10.2139/ssrn.6043345
Cited by: 0
References: 59

Fields of Study & Subjects

Copper Interconnects and Reliability Semiconductor materials and interfaces Electron and X-Ray Spectroscopy Techniques

Publication details

Journal / source
SSRN Electronic Journal
Publication date
1 January 2026
Document type
Preprint